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Chemraz XPE

Category:	Perfluoroelastomer , Perfluoroelastomer
Manufacturer:	Greene, Tweed & Co.
Trademark:	Chemraz
Fillers:	-
Ports:	Qinzhou, Shekou, Shanghai, Ningbo
Delivery Terms	FOB, CIF, DAP, DAT, DDP
PDF:	NgQ8hG_Chemraz-XPE.pdf
PRICE:	Order Products email sales@su-jiao.com

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Message
Protection against oxygen-infused plasma is key in many etch chamber environments. These harsh environments often breakdown non-resistant materials, causing harmful particulation and, ultimately, defective chips. Greene, Tweed's Chemraz® XPE is highly resistant to O2 plasma and can be used in a wide range of applications, such as slit valve doors, reaction chamber lid seals, and gate valve seals. This advanced elastomeric material offers the semiconductor and solar industry an alternative to legacy products that quickly erode in the oxygen environment. With excellent resistance to both 02 and CF4 plasmas, this material affords an increased chip yield and maximized production. In addition, XPE seals provide customers with an increased MTBR (mean time between repair) to reduce downtime and maintenance costs.

Message

Protection against oxygen-infused plasma is key in many etch chamber environments. These harsh environments often breakdown non-resistant materials, causing harmful particulation and, ultimately, defective chips.

Greene, Tweed's Chemraz® XPE is highly resistant to O2 plasma and can be used in a wide range of applications, such as slit valve doors, reaction chamber lid seals, and gate valve seals. This advanced elastomeric material offers the semiconductor and solar industry an alternative to legacy products that quickly erode in the oxygen environment. With excellent resistance to both 02 and CF4 plasmas, this material affords an increased chip yield and maximized production. In addition, XPE seals provide customers with an increased MTBR (mean time between repair) to reduce downtime and maintenance costs.

General Information
Uses	Seals Valves/Valve Parts
Appearance	Grey
Forms	Pellets

Physical	Nominal Value	Unit	Test Method
Specific Gravity	2.12	g/cm³	ASTM D792

Hardness	Nominal Value	Unit	Test Method
Rockwell Hardness (M-Scale)	76		ASTM D1414
Durometer Hardness (Shore A)	73		ASTM D2240

Elastomers	Nominal Value	Unit	Test Method
Tensile Stress (100% Strain)	3.63	MPa	ASTM D1414
Tensile Strength (Break)	13.3	MPa	ASTM D1414
Tensile Elongation (Break)	220	%	ASTM D1414
Compression Set ¹
204°C, 70 hr	15	%
240°C, 70 hr	22	%

Thermal	Nominal Value	Unit
Service Temperature	280	°C

Note Message
1 .	25% Deflection

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