Category: | Perfluoroelastomer , Perfluoroelastomer |
Manufacturer: | Greene, Tweed & Co. |
Trademark: | VORAZ™ |
Fillers: | - |
Ports: | Qinzhou, Shekou, Shanghai, Ningbo |
Delivery Terms | FOB, CIF, DAP, DAT, DDP |
PDF: | 3l2NeD_VORAZ-511.pdf ![]() |
PRICE: | Order Products email sales@su-jiao.com |
Message |
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Greene, Tweed's Voraz™ 511, a perfluoroelastomer, combines good resistance to CVD and etch plasmas with low stiction to enhance process chamber efficiency and increase uptime in FPD and solar applications. Additionally, Greene, Tweed's proprietary (patent pending) Extenis® manufacturing process facilitates the creation of large seals such as those used in Gen 5+ slit valve doors and chamber lids. This unique combination of materials properties and design capability make Voraz 511 a highly engineered seal solution that is optimized to reduce the total cost of tool ownership for FPD and solar process equipment. |
General Information | |
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Physical | Nominal Value | Unit | Test Method |
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Specific Gravity | 2.03 | g/cm³ | ASTM D297 |
Hardness | Nominal Value | Unit | Test Method |
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Durometer Hardness (Shore A) | 78 | ASTM D2240 |
Elastomers | Nominal Value | Unit | Test Method |
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Tensile Stress | ASTM D1414 | ||
50% Strain | 2.83 | MPa | |
100% Strain | 6.38 | MPa | |
Tensile Strength (Break) | 14.5 | MPa | ASTM D1414 |
Tensile Elongation (Break) | 190 | % | ASTM D1414 |
Compression Set (204°C, 70 hr) | 23 | % | ASTM D395 |
Thermal | Nominal Value | Unit | |
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Service Temperature | 205 | °C |
Additional Information | Nominal Value | Unit | |
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Sticking Point | 8200 | g |
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